KLA Tencor Micro XAM-100-HR Interferometer
KLA Tencor Micro XAM-100-HR Interferometer
KLA Tencor Micro XAM-100-HR Interferometer
The MicroXAM -100 3D surface profilometer and optical interferometer can measure fields of view from 100 x 100 micrometers to 2.0 x 2.0 millimeters (dependent on the objective lens used). The MicroXAM 3D surface profiler and 100 optical interferometer quickly and accurately measures the 3D topography of surfaces at the nanometer level with 0.1 nm z-resolution (scan setup dependent) a z-scan range of 250 micrometers (or up to 10 mm with Z-Stitching). With the new 3D image stitching capabilities, multiple images can be stitched together to produce an extended fields of view.
- Objectives Available Include 10, 20, and 50X
- Vibration Isolation Base
Location: Rowan Glassboro Campus, Science Hall, Room 105
Questions about this equipment can be directed to Dr. Ted Scabarozi at scabarozi@rowan.edu
Scheduling & Training
This equipment is available for use by Rowan students, faculty, and staff, as well as external partners. Requests to use this equipment can be made through BookMyLab. To sign up for a BookMyLab account, visit rowanphysics.bookmylab.com and follow these instructions.
The use of this equipment requires training, Typically 30-60 minutes. Please contact Dr. Ted Scabarozi at scabarozi@rowan.edu to schedule a training session.
Pricing
|
Internal/External Academic |
SBIR/STTR |
Corporate Collaborator/ Government |
Corporate |
|
|
Hourly Usage Rate |
$10.00 |
$30.00 |
$60.00 |
$100.00 |
|
Training & Technical Assistance |
$50.00 |
$75.00 |
$75.00 |
$100.00 |
|
Sample Service |
$75.00 |
$100.00 |
$100.00 |
$150.00 |
|
Technical Service |
$150.00 |
$200.00 |
$200.00 |
$250.00 |
Department of Physics & Astronomy: Equipment Index
The Department of Physics & Astronomy has microscopes, spectrometers, physical property characterization tools, synthesis tools, and general purpose equipment, available for use by Rowan students, faculty, and staff, as well as external partners.
